Secondary ion mass spectrometry

IUPAC RECOMMENDATIONS 2013
Secondary ion mass spectrometry
Technique in which a focused beam of primary ions produces secondary ions by sputtering from a solid surface. The secondary ions are analyzed by mass spectrometry.
Related Term(s): dynamic secondary ion mass spectrometry (DSIMS)
Reference(s): A. Benninghoven, B. Hagenhoff, E. Niehuis. Anal. Chem. 65, 630A (1993).
From Definitions of Terms Relating to Mass Spectrometry (IUPAC Recommendations 2013); DOI: 10.1351/PAC-REC-06-04-06 © IUPAC 2013.
Index of Recommended Terms

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Gallery

Overview of various ion-surface interactions. (1)-incoming ion; (2)-scattering; (3)-neutralization and scattering; (4)-sputtering or recoiling; (5)-electron emission; (6)-photon emission; (7)-adsorption; (8)-displacement, e.g. from sputtering event.

SHRIMP II @ Curtin University, Western Australia

CAMECA IMS3f (1980) Magnetic SIMS Instrument