Residual gas analyzer
From Mass Spec Terms
| IUPAC RECOMMENDATIONS 2013 |
| Residual gas analyzer |
|---|
| Mass spectrometer used to measure the composition and pressure of gases in an evacuated chamber and to test for leaks in pressurized systems. |
| Related Term(s): |
| Reference(s):
J. F. OHanlon. A Users Guide to Vacuum Technology, John Wiley, New York (2003). |
| From Definitions of Terms Relating to Mass Spectrometry (IUPAC Recommendations 2013); DOI: 10.1351/PAC-REC-06-04-06 © IUPAC 2013. |
