Residual gas analyzer: Difference between revisions
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[[Mass spectrometer]] used to measure the composition and pressure of gases in an evacuated chamber and to test for leaks in pressurized systems. | [[Mass spectrometer]] used to measure the composition and pressure of gases in an evacuated chamber and to test for leaks in pressurized systems. | ||
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|ref=J. F. | |ref=J. F. O'Hanlon. A User's Guide to Vacuum Technology, John Wiley, New York (2003). | ||
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[[Category:M/z Separation]] | [[Category:M/z Separation]] | ||
[[Category:Mass spectrometer type]] | |||
Latest revision as of 16:20, 6 August 2025
| IUPAC RECOMMENDATIONS 2013 |
| Residual gas analyzer |
|---|
| Mass spectrometer used to measure the composition and pressure of gases in an evacuated chamber and to test for leaks in pressurized systems. |
| Related Term(s): |
| Reference(s):
J. F. O'Hanlon. A User's Guide to Vacuum Technology, John Wiley, New York (2003). |
| From Definitions of Terms Relating to Mass Spectrometry (IUPAC Recommendations 2013); DOI: 10.1351/PAC-REC-06-04-06 © IUPAC 2013. |
